%0 Conference Proceedings %T Middle-infrared ultrafast superconducting single photon detector %A Gol’tsman, G. %A Korneev, A. %A Tarkhov, M. %A Seleznev, V. %A Divochiy, A. %A Minaeva, O. %A Kaurova, N. %A Voronov, B. %A Okunev, O. %A Chulkova, G. %A Milostnaya, I. %A Smirnov, K. %S 32nd IRMW / 15th ICTE %D 2007 %F Goltsman_etal2007 %O exported from refbase (https://db.rplab.ru/refbase/show.php?record=1246), last updated on Sun, 16 May 2021 12:41:02 -0500 %X We present the results of the research on quantum efficiency of the ultrathin-film superconducting single-photon detectors (SSPD) in the wavelength rage from 1 mum to 5.7 mum. Reduction of operation temperature to 1.6 K allowed us to measure quantum efficiency of ~1 % at 5.7 mum wavelength with the SSPD made from 4-nm-thick NbN film. In a pursuit of further performance improvement we endeavored SSPD fabricating from 4-nm-thick MoRe film as an alternative material. The MoRe film exhibited transition temperature of 7.7K, critical current density at 4.2 K temperature was 1.1times10 6 A/cm 2 , and diffusivity 1.73 cmVs. The single-photon response was observed with MoRe SSPD at 1.3 mum wavelength with quantum efficiency estimated to be 0.04%. %K SSPD %K SNSPD %R 10.1109/ICIMW.2007.4516419 %U https://doi.org/10.1109/ICIMW.2007.4516419 %P 115-116