%0 Generic %T Superconductivity behavior in epitaxial TiN films points at surface magnetic disorder %A Saveskul, N. A. %A Titova, N. A. %A Baeva, E. M. %A Semenov, A. V. %A Lubenchenko, A. V. %A Saha, S. %A Reddy, H. %A Bogdanov, S. I. %A Marinero, E. E. %A Shalaev, V. M. %A Boltasseva, A. %A Khrapai, V. S. %A Kardakova, A. I. %A Goltsman, G. N. %D 2019 %F Saveskul_etal2019 %O exported from refbase (https://db.rplab.ru/refbase/show.php?record=1278), last updated on Sat, 08 May 2021 15:19:32 -0500 %X We analyze the evolution of the normal and superconducting electronic properties in epitaxial TiN films, characterized by high Ioffe-Regel parameter values, as a function of the film thickness. As the film thickness decreases, we observe an increase of in the residual resistivity, which becomes dominated by diffusive surface scattering for d≤20nm. At the same time, a substantial thickness-dependent reduction of the superconducting critical temperature is observed compared to the bulk TiN value. In such a high quality material films, this effect can be explained by a weak magnetic disorder residing in the surface layer with a characteristic magnetic defect density of ∼1012cm−2. Our results suggest that surface magnetic disorder is generally present in oxidized TiN films. %9 miscellaneous %U https://arxiv.org/abs/1903.05009v3