%0 Journal Article %T Photon counting statistics of superconducting single-photon detectors made of a three-layer WSi film %A Florya, I. N. %A Korneeva, Y. P. %A Mikhailov, M. Y. %A Devizenko, A. Y. %A Korneev, A. A. %A Goltsman, G. N. %J Low Temp. Phys. %D 2018 %V 44 %N 3 %@ 1063-777X %F Florya_etal2018 %O exported from refbase (https://db.rplab.ru/refbase/show.php?record=1310), last updated on Sun, 09 May 2021 18:58:24 -0500 %X Superconducting nanowire single-photon detectors (SNSPD) are used in quantum optics when record-breaking time resolution, high speed, and exceptionally low levels of dark counts (false readings) are required. Their detection efficiency is limited, however, by the absorption coefficient of the ultrathin superconducting film for the detected radiation. One possible way of increasing the detector absorption without limiting its broadband response is to make a detector in the form of several vertically stacked layers and connect them in parallel. For the first time we have studied single-photon detection in a multilayer structure consisting of three superconducting layers of amorphous tungsten silicide (WSi) separated by thin layers of amorphous silicon. Two operating modes of the detector are illustrated: an avalanche regime and an arm-trigger regime. A shift in these modes occurs at currents of ∼0.5–0.6 times the critical current of the detector.This work was supported by technical task No. 88 for scientific research at the National Research University “Higher School of Economics,” Grant No. 14.V25.31.0007 from the Ministry of Education and Science of Russia, and the work of G. N. Goltsman was supported by task No. 3.7328.2017/VU of the Ministry of Education and Science of Russia. %K WSi SSPD %K SNSPD %R 10.1063/1.5024539 %U http://aip.scitation.org/doi/10.1063/1.5024539 %U https://doi.org/10.1063/1.5024539 %P 221-225