PT Journal AU Murphy, A Semenov, A Korneev, A Korneeva, Y Gol'tsman, G Bezryadin, A TI Three temperature regimes in superconducting photon detectors: quantum, thermal and multiple phase-slips as generators of dark counts SO Sci. Rep. JI Sci. Rep. PY 2015 BP 10174 (1 to 10) VL 5 DI 10.1038/srep10174 DE SPD; SSPD; SNSPD AB We perform measurements of the switching current distributions of three w approximately 120 nm wide, 4 nm thick NbN superconducting strips which are used for single-photon detectors. These strips are much wider than the diameter of the vortex cores, so they are classified as quasi-two-dimensional (quasi-2D). We discover evidence of macroscopic quantum tunneling by observing the saturation of the standard deviation of the switching distributions at temperatures around 2 K. We analyze our results using the Kurkijarvi-Garg model and find that the escape temperature also saturates at low temperatures, confirming that at sufficiently low temperatures, macroscopic quantum tunneling is possible in quasi-2D strips and can contribute to dark counts observed in single photon detectors. At the highest temperatures the system enters a multiple phase-slip regime. In this range single phase-slips are unable to produce dark counts and the fluctuations in the switching current are reduced. ER