TY - JOUR AU - Schuck, C. AU - Pernice, W. H. P. AU - Minaeva, O. AU - Li, Mo AU - Gol'tsman, G. AU - Sergienko, A. V. AU - Tang, H. X. PY - 2013 DA - 2013// TI - Matrix of integrated superconducting single-photon detectors with high timing resolution T2 - IEEE Trans. Appl. Supercond. JO - IEEE Trans. Appl. Supercond. SP - 2201007 VL - 23 IS - 3 KW - NbN SSPD KW - SNSPD KW - array KW - matrix AB - We demonstrate a large grid of individually addressable superconducting single photon detectors on a single chip. Each detector element is fully integrated into an independent waveguide circuit with custom functionality at telecom wavelengths. High device density is achieved by fabricating the nanowire detectors in traveling wave geometry directly on top of silicon-on-insulator waveguides. Our superconducting single photon detector matrix includes detector designs optimized for high detection efficiency, low dark count rate, and high timing accuracy. As an example, we exploit the high timing resolution of a particularly short nanowire design to resolve individual photon round-trips in a cavity ring-down measurement of a silicon ring resonator. SN - 1051-8223 UR - http://ieeexplore.ieee.org/document/6409998/ UR - https://doi.org/10.1109/TASC.2013.2239346 DO - 10.1109/TASC.2013.2239346 N1 - exported from refbase (https://db.rplab.ru/refbase/show.php?record=1373), last updated on Thu, 13 May 2021 15:02:47 -0500 ID - Schuck_etal2013 ER -