@Misc{Saysz_etal2008,
author="S{\'a}ysz, Wojciech
and Guziewicz, Marek
and Bar, Jan
and Wegrzecki, Maciej
and Grabiec, Piotr
and Grodecki, Remigiusz
and Wegrzecka, Iwona
and Zwiller, Val
and Milosnaya, Irina
and Voronov, Boris
and Gol{\textquoteright}tsman, Gregory
and Kitaygorsky, Jen
and Sobolewski, Roman",
title="Superconducting NbN nanostructures for single photon quantum detectors",
year="2008",
pages="160",
optkeywords="SSPD; SNSPD",
abstract="Practical quantum systems such as quantum communication (QC) or quantum measurement systems require detectors with high speed, high sensitivity, high quantum efficiency (QE), and short deadtimes along with precise timing characteristics and low dark counts. Superconducting single photon detectors (SSPDs) based on ultrathin meander type NbN nanostripes (operated at T=2-5K) are a new and highly promising type of devices fulfilling above requirements. In this paper we present results of the SSPDs nanostructure technological optimization. The base for our detector is thin-film (4nm) NbN layer deposited on 350- P m-thick sapphire substrate The active element of the detector is a meander- nanostructure made of 4-nm-thick and 100-nm-wide NbN stripe, covering 10 u 10 P m 2 area with the filling factor {\textasciitilde}0,5. The NbN superconducting films were deposited on sapphire substrates by DC reactive magnetron sputtering whereas the meander element of the detector was patterned by the direct electron-beam lithography followed by reactive-ion etching. To enhance the SSPD efficiency at Ȝ = 1.55 P m, we have performed an approach to increase the absorption of the detector by integrating it with optical resonant cavity. An optical microcavity optimized for absorption of 1.55 P m photons was designed as an one-mirror resonator consisting of a Ȝ/4 dielectric layer and a metallic mirror. The microcavity was deposited on the top of the NbN SSPD meander. The resonator was formed by the dielectric SiO 2 layer and metal mirror made of gold or palladium. Microcavity layers were deposited using a magnetron sputtering system.",
optnote="exported from refbase (https://db.rplab.ru/refbase/show.php?record=1409), last updated on Sat, 15 May 2021 00:06:00 -0500",
opturl="https://inis.iaea.org/collection/NCLCollectionStore/_Public/40/107/40107897.pdf"
}