TY - ABST AU - Sáysz, Wojciech AU - Guziewicz, Marek AU - Bar, Jan AU - Wegrzecki, Maciej AU - Grabiec, Piotr AU - Grodecki, Remigiusz AU - Wegrzecka, Iwona AU - Zwiller, Val AU - Milosnaya, Irina AU - Voronov, Boris AU - Gol’tsman, Gregory AU - Kitaygorsky, Jen AU - Sobolewski, Roman PY - 2008 DA - 2008// TI - Superconducting NbN nanostructures for single photon quantum detectors T2 - Proc. 7-th Int. Conf. Ion Implantation and Other Applications of Ions and Electrons BT - Proc. 7-th Int. Conf. Ion Implantation and Other Applications of Ions and Electrons SP - 160 KW - SSPD KW - SNSPD AB - Practical quantum systems such as quantum communication (QC) or quantum measurement systems require detectors with high speed, high sensitivity, high quantum efficiency (QE), and short deadtimes along with precise timing characteristics and low dark counts. Superconducting single photon detectors (SSPDs) based on ultrathin meander type NbN nanostripes (operated at T=2-5K) are a new and highly promising type of devices fulfilling above requirements. In this paper we present results of the SSPDs nanostructure technological optimization. The base for our detector is thin-film (4nm) NbN layer deposited on 350- P m-thick sapphire substrate The active element of the detector is a meander- nanostructure made of 4-nm-thick and 100-nm-wide NbN stripe, covering 10 u 10 P m 2 area with the filling factor ~0,5. The NbN superconducting films were deposited on sapphire substrates by DC reactive magnetron sputtering whereas the meander element of the detector was patterned by the direct electron-beam lithography followed by reactive-ion etching. To enhance the SSPD efficiency at Ȝ = 1.55 P m, we have performed an approach to increase the absorption of the detector by integrating it with optical resonant cavity. An optical microcavity optimized for absorption of 1.55 P m photons was designed as an one-mirror resonator consisting of a Ȝ/4 dielectric layer and a metallic mirror. The microcavity was deposited on the top of the NbN SSPD meander. The resonator was formed by the dielectric SiO 2 layer and metal mirror made of gold or palladium. Microcavity layers were deposited using a magnetron sputtering system. UR - https://inis.iaea.org/collection/NCLCollectionStore/_Public/40/107/40107897.pdf N1 - exported from refbase (https://db.rplab.ru/refbase/show.php?record=1409), last updated on Sat, 15 May 2021 00:06:00 -0500 ID - Saysz_etal2008 ER -