PT Journal
AU Gao, JR
   Hajenius, M
   Tichelaar, FD
   Klapwijk, TM
   Voronov, B
   Grishin, E
   Gol’tsman, G
   Zorman, CA
   Mehregany, M
TI Monocrystalline NbN nanofilms on a 3C-SiC∕Si substrate
SO Appl. Phys. Lett.
JI Appl. Phys. Lett.
PY 2007
BP 062504 (1 to 3)
VL 91
IS 6
DI 10.1063/1.2766963
DE NbN films; nanofilms
AB The authors have realized NbN (100) nanofilms on a 3C-SiC (100)/Si(100) substrate by dc reactive magnetron sputtering at 800°C. High-resolution transmission electron microscopy (HRTEM) is used to characterize the films, showing a monocrystalline structure and confirming epitaxial growth on the 3C-SiC layer. A film ranging in thickness from 3.4to4.1nm shows a superconducting transition temperature of 11.8K, which is the highest reported for NbN films of comparable thickness. The NbN nano-films on 3C-SiC offer a promising alternative to improve terahertz detectors. For comparison, NbN nanofilms grown directly on Si substrates are also studied by HRTEM.The authors acknowledge S. V. Svetchnikov at National Centre for HRTEM at Delft, who prepared the specimens for HRTEM inspections. This work was supported by the EU through RadioNet and INTAS.
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