@Article{Yang_etal2005,
author="Yang, J. K. W.
and Dauler, E.
and Ferri, A.
and Pearlman, A.
and Verevkin, A.
and Gol{\textquoteright}tsman, G.
and Voronov, B.
and Sobolewski, R.
and Keicher, W. E.
and Berggren, K. K.",
title="Fabrication development for nanowire GHz-counting-rate single-photon detectors",
journal="IEEE Trans. Appl. Supercond.",
year="2005",
volume="15",
number="2",
pages="626--630",
optkeywords="NbN SSPD; SNSPD",
abstract="We have developed a fabrication process for GHz-counting-rate, single-photon, high-detection-efficiency, NbN, nanowire detectors. We have demonstrated two processes for the device patterning, one based on the standard polymethylmethacrylate (PMMA) organic positive-tone electron-beam resist, and the other based on the newer hydrogen silsesquioxane (HSQ) negative-tone spin-on-glass resist. The HSQ-based process is simple and robust, providing high resolution and the prospect of high fill-factors. Initial testing results show superconductivity in the films, and suggest that the devices exhibit photosensitivity.",
optnote="exported from refbase (https://db.rplab.ru/refbase/show.php?record=1466), last updated on Mon, 17 May 2021 16:54:25 -0500",
issn="1558-2515",
doi="10.1109/TASC.2005.849971",
opturl="https://doi.org/10.1109/TASC.2005.849971"
}