%0 Journal Article
%T Fabrication development for nanowire GHz-counting-rate single-photon detectors
%A Yang, J. K. W.
%A Dauler, E.
%A Ferri, A.
%A Pearlman, A.
%A Verevkin, A.
%A Gol’tsman, G.
%A Voronov, B.
%A Sobolewski, R.
%A Keicher, W. E.
%A Berggren, K. K.
%J IEEE Trans. Appl. Supercond.
%D 2005
%V 15
%N 2
%@ 1558-2515
%F Yang_etal2005
%O exported from refbase (https://db.rplab.ru/refbase/show.php?record=1466), last updated on Mon, 17 May 2021 16:54:25 -0500
%X We have developed a fabrication process for GHz-counting-rate, single-photon, high-detection-efficiency, NbN, nanowire detectors. We have demonstrated two processes for the device patterning, one based on the standard polymethylmethacrylate (PMMA) organic positive-tone electron-beam resist, and the other based on the newer hydrogen silsesquioxane (HSQ) negative-tone spin-on-glass resist. The HSQ-based process is simple and robust, providing high resolution and the prospect of high fill-factors. Initial testing results show superconductivity in the films, and suggest that the devices exhibit photosensitivity.
%K NbN SSPD
%K SNSPD
%R 10.1109/TASC.2005.849971
%U https://doi.org/10.1109/TASC.2005.849971
%P 626-630