PT Journal
AU Yang, JKW
   Dauler, E
   Ferri, A
   Pearlman, A
   Verevkin, A
   Gol’tsman, G
   Voronov, B
   Sobolewski, R
   Keicher, WE
   Berggren, KK
TI Fabrication development for nanowire GHz-counting-rate single-photon detectors
SO IEEE Trans. Appl. Supercond.
JI IEEE Trans. Appl. Supercond.
PY 2005
BP 626
EP 630
VL 15
IS 2
DI 10.1109/TASC.2005.849971
DE NbN SSPD; SNSPD
AB We have developed a fabrication process for GHz-counting-rate, single-photon, high-detection-efficiency, NbN, nanowire detectors. We have demonstrated two processes for the device patterning, one based on the standard polymethylmethacrylate (PMMA) organic positive-tone electron-beam resist, and the other based on the newer hydrogen silsesquioxane (HSQ) negative-tone spin-on-glass resist. The HSQ-based process is simple and robust, providing high resolution and the prospect of high fill-factors. Initial testing results show superconductivity in the films, and suggest that the devices exhibit photosensitivity.
ER