TY  - JOUR
AU  - Yang, J. K. W.
AU  - Dauler, E.
AU  - Ferri, A.
AU  - Pearlman, A.
AU  - Verevkin, A.
AU  - Gol’tsman, G.
AU  - Voronov, B.
AU  - Sobolewski, R.
AU  - Keicher, W. E.
AU  - Berggren, K. K.
PY  - 2005
DA  - 2005//
TI  - Fabrication development for nanowire GHz-counting-rate single-photon detectors
T2  - IEEE Trans. Appl. Supercond.
JO  - IEEE Trans. Appl. Supercond.
SP  - 626
EP  - 630
VL  - 15
IS  - 2
KW  - NbN SSPD
KW  - SNSPD
AB  - We have developed a fabrication process for GHz-counting-rate, single-photon, high-detection-efficiency, NbN, nanowire detectors. We have demonstrated two processes for the device patterning, one based on the standard polymethylmethacrylate (PMMA) organic positive-tone electron-beam resist, and the other based on the newer hydrogen silsesquioxane (HSQ) negative-tone spin-on-glass resist. The HSQ-based process is simple and robust, providing high resolution and the prospect of high fill-factors. Initial testing results show superconductivity in the films, and suggest that the devices exhibit photosensitivity.
SN  - 1558-2515
UR  - https://doi.org/10.1109/TASC.2005.849971
DO  - 10.1109/TASC.2005.849971
N1  - exported from refbase (https://db.rplab.ru/refbase/show.php?record=1466), last updated on Mon, 17 May 2021 16:54:25 -0500
ID  - Yang_etal2005
ER  -