%0 Journal Article %T Nano-structured superconducting single-photon detectors %A Goltsman, G. %A Korneev, A. %A Izbenko, V. %A Smirnov, K. %A Kouminov, P. %A Voronov, B. %A Kaurova, N. %A Verevkin, A. %A Zhang, J. %A Pearlman, A. %A Slysz, W. %A Sobolewski, R. %J Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment %D 2004 %V 520 %N 1-3 %@ 0168-9002 %F Goltsman_etal2004 %O exported from refbase (https://db.rplab.ru/refbase/show.php?record=1495), last updated on Tue, 18 May 2021 13:18:45 -0500 %X NbN detectors, formed into meander-type, 10×10-μm2 area structures, based on ultrathin (down to 3.5-nm thickness) and nanometer-width (down to below 100 nm) NbN films are capable of efficiently detecting and counting single photons from the ultraviolet to near-infrared optical wavelength range. Our best devices exhibit QE >15% in the visible range and ∼10% in the 1.3–1.5-μm infrared telecommunication window. The noise equivalent power (NEP) ranges from ∼10−17 W/Hz1/2 at 1.5 μm radiation to ∼10−19 W/Hz1/2 at 0.56 μm, and the dark counts are over two orders of magnitude lower than in any semiconducting competitors. The intrinsic response time is estimated to be <30 ps. Such ultrafast detector response enables a very high, GHz-rate real-time counting of single photons. Already established applications of NbN photon counters are non-invasive testing and debugging of VLSI Si CMOS circuits and quantum communications. %K NbN SSPD %K SNSPD %R 10.1016/j.nima.2003.11.305 %U https://linkinghub.elsevier.com/retrieve/pii/S0168900203032315 %U https://doi.org/10.1016/j.nima.2003.11.305 %P 527-529