@Article{Goltsman_etal2003,
author="Gol{\textquoteright}tsman, G. N.
and Smirnov, K.
and Kouminov, P.
and Voronov, B.
and Kaurova, N.
and Drakinsky, V.
and Zhang, J.
and Verevkin, A.
and Sobolewski, R.",
title="Fabrication of nanostructured superconducting single-photon detectors",
journal="IEEE Trans. Appl. Supercond.",
year="2003",
volume="13",
number="2",
pages="192--195",
optkeywords="NbN SSPD; SNSPD",
abstract="Fabrication of NbN superconducting single-photon detectors, based on the hotspot effect is presented. The hotspot formation arises in an ultrathin and submicrometer-width superconductor stripe and, together with the supercurrent redistribution, leads to the resistive detector response upon absorption of a photon. The detector has a meander structure to maximally increase its active area and reach the highest detection efficiency. Main processing steps, leading to efficient devices, sensitive in 0.4-5 /spl mu/m wavelength range, are presented. The impact of various processing steps on the performance and operational parameters of our detectors is discussed.",
optnote="exported from refbase (https://db.rplab.ru/refbase/show.php?record=1515), last updated on Thu, 20 May 2021 19:20:18 -0500",
issn="1558-2515",
doi="10.1109/TASC.2003.813678",
opturl="https://doi.org/10.1109/TASC.2003.813678"
}