%0 Journal Article
%T Fabrication of nanostructured superconducting single-photon detectors
%A Gol’tsman, G. N.
%A Smirnov, K.
%A Kouminov, P.
%A Voronov, B.
%A Kaurova, N.
%A Drakinsky, V.
%A Zhang, J.
%A Verevkin, A.
%A Sobolewski, R.
%J IEEE Trans. Appl. Supercond.
%D 2003
%V 13
%N 2
%@ 1558-2515
%F Goltsman_etal2003
%O exported from refbase (https://db.rplab.ru/refbase/show.php?record=1515), last updated on Thu, 20 May 2021 19:20:18 -0500
%X Fabrication of NbN superconducting single-photon detectors, based on the hotspot effect is presented. The hotspot formation arises in an ultrathin and submicrometer-width superconductor stripe and, together with the supercurrent redistribution, leads to the resistive detector response upon absorption of a photon. The detector has a meander structure to maximally increase its active area and reach the highest detection efficiency. Main processing steps, leading to efficient devices, sensitive in 0.4-5 /spl mu/m wavelength range, are presented. The impact of various processing steps on the performance and operational parameters of our detectors is discussed.
%K NbN SSPD
%K SNSPD
%R 10.1109/TASC.2003.813678
%U https://doi.org/10.1109/TASC.2003.813678
%P 192-195