PT Journal
AU Gol’tsman, GN
   Smirnov, K
   Kouminov, P
   Voronov, B
   Kaurova, N
   Drakinsky, V
   Zhang, J
   Verevkin, A
   Sobolewski, R
TI Fabrication of nanostructured superconducting single-photon detectors
SO IEEE Trans. Appl. Supercond.
JI IEEE Trans. Appl. Supercond.
PY 2003
BP 192
EP 195
VL 13
IS 2
DI 10.1109/TASC.2003.813678
DE NbN SSPD; SNSPD
AB Fabrication of NbN superconducting single-photon detectors, based on the hotspot effect is presented. The hotspot formation arises in an ultrathin and submicrometer-width superconductor stripe and, together with the supercurrent redistribution, leads to the resistive detector response upon absorption of a photon. The detector has a meander structure to maximally increase its active area and reach the highest detection efficiency. Main processing steps, leading to efficient devices, sensitive in 0.4-5 /spl mu/m wavelength range, are presented. The impact of various processing steps on the performance and operational parameters of our detectors is discussed.
ER