TY  - JOUR
AU  - Gol’tsman, G. N.
AU  - Smirnov, K.
AU  - Kouminov, P.
AU  - Voronov, B.
AU  - Kaurova, N.
AU  - Drakinsky, V.
AU  - Zhang, J.
AU  - Verevkin, A.
AU  - Sobolewski, R.
PY  - 2003
DA  - 2003//
TI  - Fabrication of nanostructured superconducting single-photon detectors
T2  - IEEE Trans. Appl. Supercond.
JO  - IEEE Trans. Appl. Supercond.
SP  - 192
EP  - 195
VL  - 13
IS  - 2
KW  - NbN SSPD
KW  - SNSPD
AB  - Fabrication of NbN superconducting single-photon detectors, based on the hotspot effect is presented. The hotspot formation arises in an ultrathin and submicrometer-width superconductor stripe and, together with the supercurrent redistribution, leads to the resistive detector response upon absorption of a photon. The detector has a meander structure to maximally increase its active area and reach the highest detection efficiency. Main processing steps, leading to efficient devices, sensitive in 0.4-5 /spl mu/m wavelength range, are presented. The impact of various processing steps on the performance and operational parameters of our detectors is discussed.
SN  - 1558-2515
UR  - https://doi.org/10.1109/TASC.2003.813678
DO  - 10.1109/TASC.2003.813678
N1  - exported from refbase (https://db.rplab.ru/refbase/show.php?record=1515), last updated on Thu, 20 May 2021 19:20:18 -0500
ID  - Goltsman_etal2003
ER  -