@InProceedings{Baubert_etal2003, author="Baubert, J. and Salez, M. and Delorme, Y. and Pons, P. and Goltsman, G. and Merkel, H. and Leconte, B.", editor="Chiao, J-C and Varadan, V. K. and Can{\'e}, C.", title="Membrane-based HEB mixer for THz applications", booktitle="Proc. SPIE", year="2003", publisher="SPIE", volume="5116", pages="551--562", optkeywords="membrane NbN HEB mixers; heterodyne receiver; stress-less membrane; coupling efficiency; submillimeter-waves frequency; low-cost space applications", abstract="We report in this paper a new concept for 2.7 THz superconducting Niobium nitride (NbN) Hot-Electron Bolometer mixer (HEB). The membrane process was developped for space telecommnunication applications a few years ago and the HEB mixer concept is now considered as the best choice for low-noise submillimeter-wave frequency heterodyne receivers. The idea is then to join these two technologies. The novel fabrication scheme is to fabricate a NbN HEB mixer on a 1 $\mu$m thick stress-less Si$_{3}$N$_{4}$/SiO$_{2}$ membrane. This seems to present numerous improvements concerning : use at higher RF frequencies, power coupling efficiency, HEB mixer sensitivity, noise temperature, and space applications. This work is to be continued within the framework of an ESA TRP project, a 2.7 THz heterodyne camera with numerous applications including a SOFIA airborne receiver. This paper presents the whole fabrication process, the validation tests and preliminary results. Membrane-based HEB mixer theory is currently being investigated and further tests such as heterodyne and Fourier transform spectrometry measurement are planed shortly.", optnote="exported from refbase (https://db.rplab.ru/refbase/show.php?record=1520), last updated on Thu, 20 May 2021 19:56:46 -0500", doi="10.1117/12.499158", opturl="https://doi.org/10.1117/12.499158" }