%0 Conference Proceedings %T Membrane-based HEB mixer for THz applications %A Baubert, J. %A Salez, M. %A Delorme, Y. %A Pons, P. %A Goltsman, G. %A Merkel, H. %A Leconte, B. %Y Chiao, J-C %Y Varadan, V. K. %Y Cané, C. %S Proc. SPIE %D 2003 %V 5116 %I SPIE %F Baubert_etal2003 %O exported from refbase (https://db.rplab.ru/refbase/show.php?record=1520), last updated on Thu, 20 May 2021 19:56:46 -0500 %X We report in this paper a new concept for 2.7 THz superconducting Niobium nitride (NbN) Hot-Electron Bolometer mixer (HEB). The membrane process was developped for space telecommnunication applications a few years ago and the HEB mixer concept is now considered as the best choice for low-noise submillimeter-wave frequency heterodyne receivers. The idea is then to join these two technologies. The novel fabrication scheme is to fabricate a NbN HEB mixer on a 1 μm thick stress-less Si[sub:3]N[sub:4]/SiO[sub:2] membrane. This seems to present numerous improvements concerning : use at higher RF frequencies, power coupling efficiency, HEB mixer sensitivity, noise temperature, and space applications. This work is to be continued within the framework of an ESA TRP project, a 2.7 THz heterodyne camera with numerous applications including a SOFIA airborne receiver. This paper presents the whole fabrication process, the validation tests and preliminary results. Membrane-based HEB mixer theory is currently being investigated and further tests such as heterodyne and Fourier transform spectrometry measurement are planed shortly. %K membrane NbN HEB mixers %K heterodyne receiver %K stress-less membrane %K coupling efficiency %K submillimeter-waves frequency %K low-cost space applications %R 10.1117/12.499158 %U https://doi.org/10.1117/12.499158 %P 551-562