PT Unknown AU Baubert, J Salez, M Delorme, Y Pons, P Goltsman, G Merkel, H Leconte, B TI Membrane-based HEB mixer for THz applications SE Proc. SPIE PY 2003 BP 551 EP 562 VL 5116 DI 10.1117/12.499158 DE membrane NbN HEB mixers; heterodyne receiver; stress-less membrane; coupling efficiency; submillimeter-waves frequency; low-cost space applications AB We report in this paper a new concept for 2.7 THz superconducting Niobium nitride (NbN) Hot-Electron Bolometer mixer (HEB). The membrane process was developped for space telecommnunication applications a few years ago and the HEB mixer concept is now considered as the best choice for low-noise submillimeter-wave frequency heterodyne receivers. The idea is then to join these two technologies. The novel fabrication scheme is to fabricate a NbN HEB mixer on a 1 μm thick stress-less Si[sub:3]N[sub:4]/SiO[sub:2] membrane. This seems to present numerous improvements concerning : use at higher RF frequencies, power coupling efficiency, HEB mixer sensitivity, noise temperature, and space applications. This work is to be continued within the framework of an ESA TRP project, a 2.7 THz heterodyne camera with numerous applications including a SOFIA airborne receiver. This paper presents the whole fabrication process, the validation tests and preliminary results. Membrane-based HEB mixer theory is currently being investigated and further tests such as heterodyne and Fourier transform spectrometry measurement are planed shortly. ER