PT Journal
AU Voronov, BM
   Gershenzon, EM
   Gol'tsman, GN
   Gubkina, TO
   Semash, VD
TI Superconductive properties of ultrathin NbN films on different substrates
SO Sverkhprovodimost': Fizika, Khimiya, Tekhnika
JI Sverkhprovodimost': Fizika, Khimiya, Tekhnika
PY 1994
BP 1097
EP 1102
VL 7
IS 6
LA Russian
DE NbN films
AB A study was made on dependence of surface resistance, critical temperature and width of superconducting transition on application temperature and thickness of NbN films, which varied within the range of 3-10 nm. Plates of sapphire, fused and monocrystalline quartz, MgO, as well as Si and silicon oxide were used as substrates. NbN films with 160 μθ·cm specific resistance and 16.5 K (Tc) critical temperature were obtained on sapphire substrates. Intensive growth of ΔTc was noted for films, applied on fused quartz, with increase of precipitation temperature. This is explained by occurrence of high tensile stresses in NbN films, caused by sufficient difference of thermal coefficients of expansion of NbN and quartz.
ER