@InProceedings{Manova_etal2020,
author="Manova, N. N.
and Simonov, N. O.
and Korneeva, Y. P.
and Korneev, A. A.",
title="Developing of NbN films for superconducting microstrip single-photon detector",
booktitle="J. Phys.: Conf. Ser.",
year="2020",
volume="1695",
pages="012116 (1 to 5)",
optkeywords="NbN SSPD; SNSPD; NbN films",
abstract="We optimized NbN films on a Si substrate with a buffer SiO2 layer to produce superconducting microstrip single-photon detectors with saturated dependence of quantum efficiency (QE) versus normalized bias current. We varied thickness of films and observed the maximum QE saturation for device based on the thinner film with the lowest ratio RS300/RS20.",
optnote="exported from refbase (https://db.rplab.ru/refbase/show.php?record=1786), last updated on Sat, 03 Jul 2021 17:33:13 -0500",
issn="1742-6588",
doi="10.1088/1742-6596/1695/1/012116",
opturl="https://iopscience.iop.org/article/10.1088/1742-6596/1695/1/012116",
opturl="https://doi.org/10.1088/1742-6596/1695/1/012116"
}