TY  - CONF
AU  - Manova, N. N.
AU  - Simonov, N. O.
AU  - Korneeva, Y. P.
AU  - Korneev, A. A.
PY  - 2020
DA  - 2020//
TI  - Developing of NbN films for superconducting microstrip single-photon detector
T2  - J. Phys.: Conf. Ser.
BT  - J. Phys.: Conf. Ser.
SP  - 012116 (1 to 5)
VL  - 1695
KW  - NbN SSPD
KW  - SNSPD
KW  - NbN films
AB  - We optimized NbN films on a Si substrate with a buffer SiO2 layer to produce superconducting microstrip single-photon detectors with saturated dependence of quantum efficiency (QE) versus normalized bias current. We varied thickness of films and observed the maximum QE saturation for device based on the thinner film with the lowest ratio RS300/RS20.
SN  - 1742-6588
UR  - https://iopscience.iop.org/article/10.1088/1742-6596/1695/1/012116
UR  - https://doi.org/10.1088/1742-6596/1695/1/012116
DO  - 10.1088/1742-6596/1695/1/012116
N1  - exported from refbase (https://db.rplab.ru/refbase/show.php?record=1786), last updated on Sat, 03 Jul 2021 17:33:13 -0500
ID  - Manova_etal2020
ER  -