TY  - CONF
AU  - Romanov, N. R.
AU  - Zolotov, P. I.
AU  - Smirnov, K. V.
PY  - 2019
DA  - 2019//
TI  - Development of disordered ultra-thin superconducting vanadium nitride films
T2  - Proc. 8th Int. Conf. Photonics and Information Optics
BT  - Proc. 8th Int. Conf. Photonics and Information Optics
SP  - 425
EP  - 426
KW  - VN films
AB  - We present the results of development and research of superconducting vanadium nitride VN films ~10 nm thick having different level of disorder. It is showed that both silicon substrate temperature T sub in process of magnetron sputtering and total gas pressure P affect superconducting transition temperature of sputtered films and R 300 /R 20 ratio defining their level of disorder. VN films suitable for development of superconducting single-photon detectors on their basis are obtained.
SN  - 978-5-7262-2536-4
UR  - http://fioconf.mephi.ru/archive/
LA  - Russian
N1  - http://fioconf.mephi.ru/files/2018/12/FIO2019-Sbornik.pdf
ID  - Romanov_etal2019
ER  -