@Article{Zolotov_etal2016,
author="Zolotov, P. I.
and Vakhtomin, Yu B.
and Divochiy, A. V.
and Seleznev, V. A.
and Smirnov, K. V.",
title="Technology development of resonator-based structures for efficiency increasing of NBN detectors of IR single photons",
journal="Proc. 5th Int. Conf. Photonics and Information Optics",
year="2016",
pages="115--116",
optkeywords="NbN SSPD",
abstract="This paper presents a technology of fabrication of NbN superconductive single- photon detectors, using resonator structures. The main results are related to optimization of the process of NbN sputtering over substrate with metallic mirrors and SiO 2 /Si 3 N 4 layers /4 thick. Investigation of the quantum efficiency of fabricated devices at 1.6 K on 1.55 $\mu$m showed triple-magnified value compared to standard Si/NbN structures.",
optnote="http://fioconf.mephi.ru/files/2015/12/FIO2016-Sbornik.pdf Разработка технологии создания резонаторных структур для увеличения квантовой эффективности NBN детекторов ИК-фотонов",
optnote="exported from refbase (https://db.rplab.ru/refbase/show.php?record=1811), last updated on Sun, 04 Jul 2021 19:14:21 -0500",
isbn="978-5-7262-2215-8",
opturl="http://fioconf.mephi.ru/en/archive/",
language="Russian"
}