%0 Journal Article
%T Technology development of resonator-based structures for efficiency increasing of NBN detectors of IR single photons
%A Zolotov, P. I.
%A Vakhtomin, Yu B.
%A Divochiy, A. V.
%A Seleznev, V. A.
%A Smirnov, K. V.
%J Proc. 5th Int. Conf. Photonics and Information Optics
%D 2016
%@ 978-5-7262-2215-8
%G Russian
%F Zolotov_etal2016
%O http://fioconf.mephi.ru/files/2015/12/FIO2016-Sbornik.pdf Разработка технологии создания резонаторных структур для увеличения квантовой эффективности NBN детекторов ИК-фотонов
%O exported from refbase (https://db.rplab.ru/refbase/show.php?record=1811), last updated on Sun, 04 Jul 2021 19:14:21 -0500
%X This paper presents a technology of fabrication of NbN superconductive single- photon detectors, using resonator structures. The main results are related to optimization of the process of NbN sputtering over substrate with metallic mirrors and SiO 2 /Si 3 N 4 layers /4 thick. Investigation of the quantum efficiency of fabricated devices at 1.6 K on 1.55 μm showed triple-magnified value compared to standard Si/NbN structures.
%K NbN SSPD
%U http://fioconf.mephi.ru/en/archive/
%P 115-116