PT Journal
AU Zolotov, PI
   Vakhtomin, YB
   Divochiy, AV
   Seleznev, VA
   Smirnov, KV
TI Technology development of resonator-based structures for efficiency increasing of NBN detectors of IR single photons
SO Proc. 5th Int. Conf. Photonics and Information Optics
JI Proc. 5th Int. Conf. Photonics and Information Optics
PY 2016
BP 115
EP 116
LA Russian
DE NbN SSPD
AB This paper presents a technology of fabrication of NbN superconductive single- photon detectors, using resonator structures. The main results are related to optimization of the process of NbN sputtering over substrate with metallic mirrors and SiO 2 /Si 3 N 4 layers /4 thick. Investigation of the quantum efficiency of fabricated devices at 1.6 K on 1.55 μm showed triple-magnified value compared to standard Si/NbN structures.
ER