TY  - JOUR
AU  - Zolotov, P. I.
AU  - Vakhtomin, Yu B.
AU  - Divochiy, A. V.
AU  - Seleznev, V. A.
AU  - Smirnov, K. V.
PY  - 2016
DA  - 2016//
TI  - Technology development of resonator-based structures for efficiency increasing of NBN detectors of IR single photons
T2  - Proc. 5th Int. Conf. Photonics and Information Optics
JO  - Proc. 5th Int. Conf. Photonics and Information Optics
SP  - 115
EP  - 116
KW  - NbN SSPD
AB  - This paper presents a technology of fabrication of NbN superconductive single- photon detectors, using resonator structures. The main results are related to optimization of the process of NbN sputtering over substrate with metallic mirrors and SiO 2 /Si 3 N 4 layers /4 thick. Investigation of the quantum efficiency of fabricated devices at 1.6 K on 1.55 μm showed triple-magnified value compared to standard Si/NbN structures.
SN  - 978-5-7262-2215-8
UR  - http://fioconf.mephi.ru/en/archive/
LA  - Russian
N1  - http://fioconf.mephi.ru/files/2015/12/FIO2016-Sbornik.pdf Разработка технологии создания резонаторных структур для увеличения квантовой эффективности NBN детекторов ИК-фотонов
ID  - Zolotov_etal2016
ER  -