%0 Conference Proceedings %T Silicon nitride photonic crystal cavity coupled with NV-centers in nanodiamonds %A Elmanov, Ilia %A Elmanova, Anna %A Kovalyuk, Vadim %A An, Pavel %A Goltsman, Gregory %S Proc. 32-nd EMSS %D 2020 %@ 2724-0029 %@ 978-88-85741-44-7 %F Elmanov_etal2020 %O exported from refbase (https://db.rplab.ru/refbase/show.php?record=1840), last updated on Thu, 12 Aug 2021 18:15:42 -0500 %X The development of integrated quantum photonics requires a high efficient excitation and coupling of a single photon source with on-chip devices. In this paper, we show our results of modelling for high-Q photonic crystal cavity, optimized for zero phonon line emission of NV-centers in nanodiamonds. Modelling was performed for the silicon nitride platform and obtained a quality factor equals to 6136 at 637 nm wavelength. %R 10.46354/i3m.2020.emss.050 %U https://doi.org/10.46354/i3m.2020.emss.050 %P 344-348