%0 Journal Article %T Superconducting single-photon ultrathin NbN film detector %A Korneev, A. %A Minaeva, O. %A Rubtsova, I. %A Milostnaya, I. %A Chulkova, G. %A Voronov, B. %A Smirnov, K. %A Seleznev, V. %A Gol'tsman, G. %A Pearlman, A. %A Slysz, W. %A Cross, A. %A Alvarez, P. %A Verevkin, A. %A Sobolewski, R. %J Quantum Electronics %D 2005 %V 35 %N 8 %F Korneev_etal2005 %O Сверхпроводящий однофотонный детектор на основе ультратонкой пленки NbN %O exported from refbase (https://db.rplab.ru/refbase/show.php?record=383), last updated on Tue, 06 Jul 2021 12:53:47 -0500 %X Superconducting single-photon ultrathin NbN film detectors are studied. The development of manufacturing technology of detectors and the reduction of their operating temperature down to 2 K resulted in a considerable increase in their quantum efficiency, which reached in the visible region (at 0.56 μm) 30%—40%, i.e., achieved the limit determined by the absorption coefficient of the film. The quantum efficiency exponentially decreases with increasing wavelength, being equal to ~20% at 1.55 μm and ~0.02% at 5 μm. For the dark count rate of ~10-4s-1, the experimental equivalent noise power was 1.5×10-20 W Hz-1/2; it can be decreased in the future down to the record low value of 5×10-21 W Hz-1/2. The time resolution of the detector is 30 ps. %K NbN SSPD %K SNSPD %R 10.1070/QE2005v035n08ABEH009152 %U https://doi.org/10.1070/QE2005v035n08ABEH009152 %P 698-700