TY - JOUR AU - Korneev, A. AU - Minaeva, O. AU - Rubtsova, I. AU - Milostnaya, I. AU - Chulkova, G. AU - Voronov, B. AU - Smirnov, K. AU - Seleznev, V. AU - Gol'tsman, G. AU - Pearlman, A. AU - Slysz, W. AU - Cross, A. AU - Alvarez, P. AU - Verevkin, A. AU - Sobolewski, R. PY - 2005 DA - 2005// TI - Superconducting single-photon ultrathin NbN film detector JO - Quantum Electronics SP - 698 EP - 700 VL - 35 IS - 8 KW - NbN SSPD KW - SNSPD AB - Superconducting single-photon ultrathin NbN film detectors are studied. The development of manufacturing technology of detectors and the reduction of their operating temperature down to 2 K resulted in a considerable increase in their quantum efficiency, which reached in the visible region (at 0.56 μm) 30%—40%, i.e., achieved the limit determined by the absorption coefficient of the film. The quantum efficiency exponentially decreases with increasing wavelength, being equal to ~20% at 1.55 μm and ~0.02% at 5 μm. For the dark count rate of ~10-4s-1, the experimental equivalent noise power was 1.5×10-20 W Hz-1/2; it can be decreased in the future down to the record low value of 5×10-21 W Hz-1/2. The time resolution of the detector is 30 ps. UR - https://doi.org/10.1070/QE2005v035n08ABEH009152 DO - 10.1070/QE2005v035n08ABEH009152 N1 - Сверхпроводящий однофотонный детектор на основе ультратонкой пленки NbN ID - Korneev_etal2005 ER -