PT Journal AU Rosfjord, KM Yang, JKW Dauler, EA Kerman, AJ Vikas Anant Voronov, BM Gol'tsman, GN Berggren, KK TI Nanowire Single-photon detector with an integrated optical cavity and anti-reflection coating SO Opt. Express JI Opt. Express PY 2006 BP 527 EP 534 VL 14 IS 2 DI 10.1364/OPEX.14.000527 DE SSPD; SNSPD; cavity AB We have fabricated and tested superconducting single-photon detectors and demonstrated detection efficiencies of 57% at 1550-nm wavelength and 67% at 1064 nm. In addition to the peak detection efficiency, a median detection efficiency of 47.7% was measured over 132 devices at 1550 nm. These measurements were made at 1.8K, with each device biased to 97.5% of its critical current. The high detection efficiencies resulted from the addition of an optical cavity and anti-reflection coating to a nanowire photodetector, creating an integrated nanoelectrophotonic device with enhanced performance relative to the original device. Here, the testing apparatus and the fabrication process are presented. The detection efficiency of devices before and after the addition of optical elements is also reported. ER