TY  - JOUR
AU  - Delacour, C.
AU  - Claudon, J.
AU  - Poizat, J-Ph
AU  - Pannetier, B.
AU  - Bouchiat, V.
AU  - de Lamaestre, R. Espiau
AU  - Villegier, J-C
AU  - Tarkhov, M.
AU  - Korneev, A.
AU  - Voronov, B.
AU  - Gol'tsman, G.
PY  - 2007
DA  - 2007//
TI  - Superconducting single photon detectors made by local oxidation with an atomic force microscope
T2  - Appl. Phys. Lett.
JO  - Appl. Phys. Lett.
SP  - 191116 (1 t0 3)
VL  - 90
IS  - 19
KW  - SSPD
AB  - The authors present a fabrication technique of superconducting single photon detectors made by local oxidation of niobium nitride ultrathin films. Narrow superconducting meander lines are obtained by direct writing of insulating niobium oxynitride lines through the films using voltage-biased tip of an atomic force microscope. Due to the 30nm resolution of the lithographic technique, the filling factor of the meander line can be made substantially higher than detector of similar geometry made by electron beam lithography, thus leading to increased quantum efficiency. Single photon detection regime of these devices is demonstrated at 4.2K.The authors thank J.-P. Maneval for stimulating discussions. This work has been partly supported by ACI Nanoscience from French Ministry of Research, D.G.A., by Grant No. 02.445.11.7434 of Russian Ministry of Education and Science, and by the European Commission under project “SINPHONIA,” Contract No. NMP4-CT-2005-16433.
SN  - 0003-6951
UR  - http://link.aip.org/link/APPLAB/v90/i19/p191116/s1&Agg=doi
UR  - https://doi.org/10.1063/1.2738195
DO  - 10.1063/1.2738195
N1  - exported from refbase (https://db.rplab.ru/refbase/show.php?record=423), last updated on Sun, 16 May 2021 15:41:43 -0500
ID  - Delacour_etal2007
ER  -