PT Journal
AU Li, TF
   Pashkin, YA
   Astafiev, O
   Nakamura, Y
   Tsai, JS
   Im, H
TI High-frequency metallic nanomechanical resonators
SO Appl. Phys. Lett.
JI Appl. Phys. Lett.
PY 2008
BP 043112(1)-043112(3)
VL 92
DI 10.1063/1.2838749
DE nanomechanical resonator; polycrystalline metal films
AB We developed a technology to fabricate fully metallic doubly clamped beams working as nanomechanical resonators. Measured with a magnetomotive detection scheme, the beams, made of polycrystalline metal films, show as good quality as previously reported ones made of single crystal materials, such as Si, GaAs, AlN, and SiC. Our method is compatible with the conventional fabrication process for nanoscale electronic circuits and thus offers a possibility of easily integrating the beams into superconducting charge and flux qubits and single-electron transistors as well as coupling them to coplanar waveguide resonators.
ER