TY  - JOUR
AU  - Li, T. F.
AU  - Pashkin, Yu A.
AU  - Astafiev, O.
AU  - Nakamura, Y.
AU  - Tsai, J. S.
AU  - Im, H.
PY  - 2008
DA  - 2008//
TI  - High-frequency metallic nanomechanical resonators
T2  - Appl. Phys. Lett.
JO  - Appl. Phys. Lett.
SP  - 043112(1)-043112(3)
VL  - 92
KW  - nanomechanical resonator
KW  - polycrystalline metal films
AB  - We developed a technology to fabricate fully metallic doubly clamped beams working as nanomechanical resonators. Measured with a magnetomotive detection scheme, the beams, made of polycrystalline metal films, show as good quality as previously reported ones made of single crystal materials, such as Si, GaAs, AlN, and SiC. Our method is compatible with the conventional fabrication process for nanoscale electronic circuits and thus offers a possibility of easily integrating the beams into superconducting charge and flux qubits and single-electron transistors as well as coupling them to coplanar waveguide resonators.
UR  - https://doi.org/10.1063/1.2838749
DO  - 10.1063/1.2838749
N1  - exported from refbase (https://db.rplab.ru/refbase/show.php?record=621), last updated on Thu, 08 Jul 2010 15:14:23 -0500
ID  - Li_etal2008
ER  -