@Article{Yang_etal2009,
author="Yang, J. K. W.
and Kerman, A. J.
and Dauler, E. A.
and Cord, B.
and Anant, V.
and Molnar, R. J.
and Berggren, K. K.",
title="Suppressed critical current in superconducting nanowire single-photon detectors with high fill-factors",
journal="IEEE Trans. Appl. Supercond.",
year="2009",
volume="19",
number="3",
pages="318--322",
optkeywords="SNSPD",
abstract="In this work we present a new fabrication process that enabled the fabrication of superconducting nanowire single photon detectors SNSPD with fill-factors as high as 88{\%} with gaps between nanowires as small as 12 nm. This fabrication process combined high-resolution electron-beam lithography with photolithography. Although this work was motivated by the potential of increased detection efficiency with higher fill-factor devices, test results showed an unexpected systematic suppression in device critical currents with increasing fill-factor.",
optnote="exported from refbase (https://db.rplab.ru/refbase/show.php?record=677), last updated on Sun, 22 May 2016 16:21:10 -0500"
}