%0 Journal Article
%T Suppressed critical current in superconducting nanowire single-photon detectors with high fill-factors
%A Yang, J. K. W.
%A Kerman, A. J.
%A Dauler, E. A.
%A Cord, B.
%A Anant, V.
%A Molnar, R. J.
%A Berggren, K. K.
%J IEEE Trans. Appl. Supercond.
%D 2009
%V 19
%N 3
%F Yang_etal2009
%O exported from refbase (https://db.rplab.ru/refbase/show.php?record=677), last updated on Sun, 22 May 2016 16:21:10 -0500
%X In this work we present a new fabrication process that enabled the fabrication of superconducting nanowire single photon detectors SNSPD with fill-factors as high as 88% with gaps between nanowires as small as 12 nm. This fabrication process combined high-resolution electron-beam lithography with photolithography. Although this work was motivated by the potential of increased detection efficiency with higher fill-factor devices, test results showed an unexpected systematic suppression in device critical currents with increasing fill-factor.
%K SNSPD
%P 318-322