PT Journal
AU Yang, JKW
   Kerman, AJ
   Dauler, EA
   Cord, B
   Anant, V
   Molnar, RJ
   Berggren, KK
TI Suppressed critical current in superconducting nanowire single-photon detectors with high fill-factors
SO IEEE Trans. Appl. Supercond.
PY 2009
BP 318
EP 322
VL 19
IS 3
DE SNSPD
AB In this work we present a new fabrication process that enabled the fabrication of superconducting nanowire single photon detectors SNSPD with fill-factors as high as 88% with gaps between nanowires as small as 12 nm. This fabrication process combined high-resolution electron-beam lithography with photolithography. Although this work was motivated by the potential of increased detection efficiency with higher fill-factor devices, test results showed an unexpected systematic suppression in device critical currents with increasing fill-factor.
ER