TY  - JOUR
AU  - Yang, J. K. W.
AU  - Kerman, A. J.
AU  - Dauler, E. A.
AU  - Cord, B.
AU  - Anant, V.
AU  - Molnar, R. J.
AU  - Berggren, K. K.
PY  - 2009
DA  - 2009//
TI  - Suppressed critical current in superconducting nanowire single-photon detectors with high fill-factors
JO  - IEEE Trans. Appl. Supercond.
SP  - 318
EP  - 322
VL  - 19
IS  - 3
KW  - SNSPD
AB  - In this work we present a new fabrication process that enabled the fabrication of superconducting nanowire single photon detectors SNSPD with fill-factors as high as 88% with gaps between nanowires as small as 12 nm. This fabrication process combined high-resolution electron-beam lithography with photolithography. Although this work was motivated by the potential of increased detection efficiency with higher fill-factor devices, test results showed an unexpected systematic suppression in device critical currents with increasing fill-factor.
N1  - exported from refbase (https://db.rplab.ru/refbase/show.php?record=677), last updated on Sun, 22 May 2016 16:21:10 -0500
ID  - Yang_etal2009
ER  -