PT Journal AU Gaggero, A Nejad, SJ Marsili, F Mattioli, F Leoni, R Bitauld, D Sahin, D Hamhuis, GJ Nötzel, R Sanjines, R Fiore, A TI Nanowire superconducting single-photon detectors on GaAs for integrated quantum photonic applications SO Applied Physics Letters JI Appl. Phys. Lett. PY 2010 BP 3 VL 97 IS 15 DE SSPD AB We demonstrate efficient nanowire superconducting single photon detectors (SSPDs) based on NbN thin films grown on GaAs. NbN films ranging from 3 to 5 nm in thickness have been deposited by dc magnetron sputtering on GaAs substrates at 350 °C. These films show superconducting properties comparable to similar films grown on sapphire and MgO. In order to demonstrate the potential for monolithic integration, SSPDs were fabricated and measured on GaAs/AlAs Bragg mirrors, showing a clear cavity enhancement, with a peak quantum efficiency of 18.3% at λ = 1300 nm and T = 4.2 K. ER