%0 Journal Article
%T Deposition and characterization of few-nanometers-thick superconducting Mo-Re films
%A Seleznev, V. A.
%A Tarkhov, M. A.
%A Voronov, B. M.
%A Milostnaya, I. I.
%A Lyakhno, V. Yu
%A Garbuz, A. S.
%A Mikhailov, M. Yu
%A Zhigalina, O. M.
%A Gol'tsman, G. N.
%J Supercond. Sci. Technol.
%D 2008
%V 21
%N 11
%F Seleznev_etal2008
%O exported from refbase (https://db.rplab.ru/refbase/show.php?record=723), last updated on Fri, 14 May 2021 23:51:27 -0500
%X We report on the fabrication and investigation of few-nanometers-thick superconducting molybdenum-rhenium (Mo-Re) films intended for use in nanowire single-photon superconducting detectors (SSPDs). Mo-Re films were deposited on sapphire substrates by DC magnetron sputtering of an Mo(60)-Re(40) alloy target in an atmosphere of argon. The films 2-10 nm thick had critical temperatures (Tc) from 5.6 to 9.7 K. HRTEM (high-resolution transmission electron microscopy) analysis showed that the films had a homogeneous structure. XPS (x-ray photoelectron spectroscopy) analysis showed the Mo to Re atom ratio to be 0.575/0.425, oxygen concentration to be 10%, and concentration of other elements to be 1%.
%R 10.1088/0953-2048/21/11/115006
%U https://doi.org/10.1088/0953-2048/21/11/115006
%P 115006 (1 to 6)