PT Journal
AU Seleznev, VA
   Tarkhov, MA
   Voronov, BM
   Milostnaya, II
   Lyakhno, VY
   Garbuz, AS
   Mikhailov, MY
   Zhigalina, OM
   Gol'tsman, GN
TI Deposition and characterization of few-nanometers-thick superconducting Mo-Re films
SO Supercond. Sci. Technol.
JI Supercond. Sci. Technol.
PY 2008
BP 115006 (1 to 6)
VL 21
IS 11
DI 10.1088/0953-2048/21/11/115006
AB We report on the fabrication and investigation of few-nanometers-thick superconducting molybdenum-rhenium (Mo-Re) films intended for use in nanowire single-photon superconducting detectors (SSPDs). Mo-Re films were deposited on sapphire substrates by DC magnetron sputtering of an Mo(60)-Re(40) alloy target in an atmosphere of argon. The films 2-10 nm thick had critical temperatures (Tc) from 5.6 to 9.7 K. HRTEM (high-resolution transmission electron microscopy) analysis showed that the films had a homogeneous structure. XPS (x-ray photoelectron spectroscopy) analysis showed the Mo to Re atom ratio to be 0.575/0.425, oxygen concentration to be 10%, and concentration of other elements to be 1%.
ER