TY  - JOUR
AU  - Seleznev, V. A.
AU  - Tarkhov, M. A.
AU  - Voronov, B. M.
AU  - Milostnaya, I. I.
AU  - Lyakhno, V. Yu
AU  - Garbuz, A. S.
AU  - Mikhailov, M. Yu
AU  - Zhigalina, O. M.
AU  - Gol'tsman, G. N.
PY  - 2008
DA  - 2008//
TI  - Deposition and characterization of few-nanometers-thick superconducting Mo-Re films
T2  - Supercond. Sci. Technol.
JO  - Supercond. Sci. Technol.
SP  - 115006 (1 to 6)
VL  - 21
IS  - 11
AB  - We report on the fabrication and investigation of few-nanometers-thick superconducting molybdenum-rhenium (Mo-Re) films intended for use in nanowire single-photon superconducting detectors (SSPDs). Mo-Re films were deposited on sapphire substrates by DC magnetron sputtering of an Mo(60)-Re(40) alloy target in an atmosphere of argon. The films 2-10 nm thick had critical temperatures (Tc) from 5.6 to 9.7 K. HRTEM (high-resolution transmission electron microscopy) analysis showed that the films had a homogeneous structure. XPS (x-ray photoelectron spectroscopy) analysis showed the Mo to Re atom ratio to be 0.575/0.425, oxygen concentration to be 10%, and concentration of other elements to be 1%.
UR  - https://doi.org/10.1088/0953-2048/21/11/115006
DO  - 10.1088/0953-2048/21/11/115006
N1  - exported from refbase (https://db.rplab.ru/refbase/show.php?record=723), last updated on Fri, 14 May 2021 23:51:27 -0500
ID  - Seleznev_etal2008
ER  -