@Article{Henrich_etal2012, author="Henrich, D. and Dorner, S. and Hofherr, M. and Il{\textquoteright}in, K. and Semenov, A. and Heintze, E. and Scheffler, M. and Dressel, M. and Siegel, M.", title="Broadening of hot-spot response spectrum of superconducting NbN nanowire single-photon detector with reduced nitrogen content", journal="J. Appl. Phys.", year="2012", volume="112", optkeywords="SSPD; SNSPD; magnetron sputtering; spectrum; NbN film; nitrogen concentration", abstract="The spectral detection efficiency and the dark count rate of superconducting nanowiresingle-photon detectors (SNSPD) have been studied systematically on detectors made from thinNbN films with different chemical compositions. Reduction of the nitrogen content in the 4 nmthick NbN films results in a decrease of the dark count rates more than two orders of magnitudeand in a red shift of the cut-off wavelength of the hot-spot SNSPD response. The observedphenomena are explained by an improvement of uniformity of NbN films that has been confirmedby a decrease of resistivity and an increase of the ratio of the measured critical current to thedepairing current. The latter factor is considered as the most crucial for both the cut-offwavelength and the dark count rates of SNSPD. Based on our results we propose a set of criteriafor material properties to optimize SNSPD in the infrared spectral region. VC 2012 AmericanInstitute of Physics. [http://dx.doi.org/10.1063/1.4757625]", optnote="exported from refbase (https://db.rplab.ru/refbase/show.php?record=877), last updated on Mon, 15 Oct 2012 18:13:34 -0500", language="English" }