%0 Journal Article %T Broadening of hot-spot response spectrum of superconducting NbN nanowire single-photon detector with reduced nitrogen content %A Henrich, D. %A Dorner, S. %A Hofherr, M. %A Il'in, K. %A Semenov, A. %A Heintze, E. %A Scheffler, M. %A Dressel, M. %A Siegel, M. %D 2012 %V 112 %G English %F Henrich_etal2012 %O exported from refbase (https://db.rplab.ru/refbase/show.php?record=877), last updated on Mon, 15 Oct 2012 18:13:34 -0500 %X The spectral detection efficiency and the dark count rate of superconducting nanowiresingle-photon detectors (SNSPD) have been studied systematically on detectors made from thinNbN films with different chemical compositions. Reduction of the nitrogen content in the 4 nmthick NbN films results in a decrease of the dark count rates more than two orders of magnitudeand in a red shift of the cut-off wavelength of the hot-spot SNSPD response. The observedphenomena are explained by an improvement of uniformity of NbN films that has been confirmedby a decrease of resistivity and an increase of the ratio of the measured critical current to thedepairing current. The latter factor is considered as the most crucial for both the cut-offwavelength and the dark count rates of SNSPD. Based on our results we propose a set of criteriafor material properties to optimize SNSPD in the infrared spectral region. VC 2012 AmericanInstitute of Physics. [http://dx.doi.org/10.1063/1.4757625] %K SSPD %K SNSPD %K magnetron sputtering %K spectrum %K NbN film %K nitrogen concentration