PT Journal AU Kahl, O Ferrari, S Kovalyuk, V Goltsman, GN Korneev, A Pernice, WHP TI Waveguide integrated superconducting single-photon detectors with high internal quantum efficiency at telecom wavelengths SO Sci. Rep. JI Sci. Rep. PY 2015 BP 10941 (1 to 11) VL 5 DI 10.1038/srep10941 DE optical waveguides; waveguide integrated SSPD; waveguide SSPD; nanophotonics AB Superconducting nanowire single-photon detectors (SNSPDs) provide high efficiency for detecting individual photons while keeping dark counts and timing jitter minimal. Besides superior detection performance over a broad optical bandwidth, compatibility with an integrated optical platform is a crucial requirement for applications in emerging quantum photonic technologies. Here we present efficiencies close to unity at 1550nm wavelength. This allows for the SNSPDs to be operated at bias currents far below the critical current where unwanted dark count events reach milli-Hz levels while on-chip detection efficiencies above 70% are maintained. The measured dark count rates correspond to noiseequivalent powers in the 10–19W/Hz–1/2 range and the timing jitter is as low as 35ps. Our detectors are fully scalable and interface directly with waveguide-based optical platforms. ER