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Author  |
Title | Year | Publication | Volume | Pages |
|---|---|---|---|---|---|
| Edlmayr, V.; Harzer, T. P.; Hoffmann, R.; Kiener, D.; Scheu, C.; Mitterer, C. | Effects of thermal annealing on the microstructure of sputtered Al2O3 coatings | 2011 | J. Vac. Sci. Technol. A | 29 | 8 |