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\bibitem{Elmanov_etal2019} Elmanov, I., Elmanova, A., Komrakova, S., Golikov, A., Kaurova, N., Kovalyuk, V., et al. (2019). Method for determination of resists parameters for photonic -- integrated circuits e-beam lithography on silicon nitride platform. In \textit{EPJ Web Conf.} (Vol. 220, 03012).

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