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Lobanov, Y. V., Vakhtomin, Y. B., Pentin, I. V., Khabibullin, R. A., Shchavruk, N. V., Smirnov, K. V., et al. (2018). Characterization of the THz quantum cascade laser using fast superconducting hot electron bolometer. EPJ Web Conf., 195, 04004 (1 to 2).
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Zolotov, P. I., Vakhtomin, Y. B., Divochiy, A. V., Seleznev, V. A., & Smirnov, K. V. (2016). Technology development of resonator-based structures for efficiency increasing of NBN detectors of IR single photons. Proc. 5th Int. Conf. Photonics and Information Optics, , 115–116.
Abstract: This paper presents a technology of fabrication of NbN superconductive single- photon detectors, using resonator structures. The main results are related to optimization of the process of NbN sputtering over substrate with metallic mirrors and SiO 2 /Si 3 N 4 layers /4 thick. Investigation of the quantum efficiency of fabricated devices at 1.6 K on 1.55 μm showed triple-magnified value compared to standard Si/NbN structures.
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