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	Author	Zolotov, P. I.; Vakhtomin, Yu. B.; Divochiy, A. V.; Seleznev, V. A.; Smirnov, K. V.
	Title	Technology development of resonator-based structures for efficiency increasing of NBN detectors of IR single photons			Type	Journal Article
	Year	2016	Publication	Proc. 5th Int. Conf. Photonics and Information Optics	Abbreviated Journal	Proc. 5th Int. Conf. Photonics and Information Optics
	Volume		Issue		Pages	115-116
	Keywords	NbN SSPD
	Abstract	This paper presents a technology of fabrication of NbN superconductive single- photon detectors, using resonator structures. The main results are related to optimization of the process of NbN sputtering over substrate with metallic mirrors and SiO 2 /Si 3 N 4 layers /4 thick. Investigation of the quantum efficiency of fabricated devices at 1.6 K on 1.55 μm showed triple-magnified value compared to standard Si/NbN structures.
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	Corporate Author				Thesis
	Publisher		Place of Publication		Editor
	Language	Russian	Summary Language		Original Title
	Series Editor		Series Title		Abbreviated Series Title
	Series Volume		Series Issue		Edition
	ISSN		ISBN	978-5-7262-2215-8	Medium
	Area		Expedition		Conference
	Notes	http://fioconf.mephi.ru/files/2015/12/FIO2016-Sbornik.pdf Разработка технологии создания резонаторных структур для увеличения квантовой эффективности NBN детекторов ИК-фотонов			Approved	no
	Call Number				Serial	1811
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